The morphology of silicon nanowires produced by metal-assisted etching of silicon changes with the doping level.
The morphology of silicon nanowires produced by metal-assisted etching of silicon changes with the doping level. Correct Answer True
The etching rate is not the only parameter affected by the type of doping. It has been reported that the morphology of silicon nanowires produced by metal-assisted etching of silicon changes with the doping level of the wafer as well and they can present rough surface or contain mpSi or μpSi structures on the side walls with increasing doping level.
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Feb 20, 2025