Illumination of light in metal-assisted etching of silicon affects the etching rate.
Illumination of light in metal-assisted etching of silicon affects the etching rate. Correct Answer True
As far as the effect of light illumination in metal-assisted etching of silicon, this has a direct effect on the etching rate. It has been reported that the etching rates for p-type and n-type (100) silicon substrates of resistivity 1–10 Ω cm differ whether the etching process is conducted with or without illumination.
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Feb 20, 2025