In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si3N4) because

In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si3N4) because Correct Answer It makes capacitor non-polar

Si3N4 gives more circuit flexibility by being non-polar, that is , it does not matter which plate is positive or negative and the voltage applied.
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