Which of the following statements about the MOS transistor is INCORRECT ?

Which of the following statements about the MOS transistor is INCORRECT ? Correct Answer In modern MOS transistors, the metal layer is often replaced by highly doped Si₃N₄

The MOS transistor (or MOSFET, i.e., MOS field-effect transistor) derives its name from the materials involved in the early transistors of this type: metal, oxide (SiO₂), and semiconductor.

In modern MOS transistors, the metal layer is often replaced by highly doped polycrystalline silicon, and the oxide layer by a combination of SiO₂ and Si₃N₄ or by other insulators.

The semiconductor is invariably silicon because it is relatively difficult to grow or deposit a high-quality insulating layer on other semiconductors.