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High resolution electron energy loss spectroscopy is a tool used in surface science. The inelastic scattering of electrons from surfaces is utilized to study electronic excitations or vibrational modes of the surface of a material or of molecules adsorbed to a surface. In contrast to other electron energy loss spectroscopies , HREELS deals with small energy losses in the range of 10 eV to 1 eV. It plays an important role in the investigation of surface structure, catalysis, dispersion of surface phonons and the monitoring of epitaxial growth.
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