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Option 1 : 1. 2 and 3
Silicon over Insulator (SOI) has the following advantages:
1. Silicon over Insulator (SOI) reduces junction capacitance and improves power efficiency: SOI devices have a low drain to substrate capacitances, due to the buried oxygen region. The reduction in source-drain capacitance usually provides incremental speed improvement (or) conversely power reduction.
2. Reduction short channel effect.
3. Lower device threshold.
4. Soft error rate reduced in memory.
5. Improves performances.
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