1 Answers
A rotating pocket heater, also called pocket heater or Kinder heater, holds and rotates a substrate during vacuum deposition. During rotation, the substrate is sequentially exposed to more than one environment, for example, heat, oxygen, metal vapor, etc. Rotating pocket heaters has been used in reactive evaporation system to create YBa2Cu3O7 layers on planar semiconductor wafers.
4 views
Answered