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Substrate mapping is a process in which the performance of semiconductor devices on a substrate is represented by a map showing the performance as a colour-coded grid. The map is a convenient representation of the variation in performance across the substrate, since the distribution of those variations may be a clue as to their cause.

The concept also includes the package of data generated by modern wafer testing equipment which can be transmitted to equipment used for subsequent 'back-end' manufacturing operations.

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