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Diffusion creep refers to the deformation of crystalline solids by the diffusion of vacancies through their crystal lattice. Diffusion creep results in plastic deformation rather than brittle failure of the material.

Diffusion creep is more sensitive to temperature than other deformation mechanisms. It usually takes place at high homologous temperatures. Diffusion creep is caused by the migration of crystalline defects through the lattice of a crystal such that when a crystal is subjected to a greater degree of compression in one direction relative to another, defects migrate to the crystal faces along the direction of compression, causing a net mass transfer that shortens the crystal in the direction of maximum compression. The migration of defects is in part due to vacancies, whose migration is equal to a net mass transport in the opposite direction.

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